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Microsystem Technologies
Published by Springer-Verlag.
ISSN 0946-7076 / 1432-1858
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Aims & scope
Microsystem Technologies publishes peer-reviewed research. Manuscripts pass a technical check and a scope check by the handling editor before going to independent reviewers.
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Recently published
A quantitative picosecond-laser trimming method for MEMS resonant devices based on process–removal–response relations
DOI 10.1007/s00542-026-06183-1 Zhuanghui Zhao, Bin Li, Jiangan Wei, Yuxian Liu · 2026
Fabrication of 3D electrode arrays through sidewall-metallization of SU-8 micropillars integrated with open-well PDMS reservoirs for low-voltage dielectrophoretic trapping of U-87 cells
DOI 10.1007/s00542-026-06180-4 Andisheh Choupani, Hanife Kantarci, Seba Nur Alhasan, Ali Fuat Ergenc, Ebrar Tutar, Betul Karademir Yilmaz, Meltem Elitas Hartmann, Murat Kaya Yapici · 2026
Foreword for the special issue MNDCS-2026
DOI 10.1007/s00542-026-06172-4 Bharat Bhushan · 2026
Preface
DOI 10.1007/s00542-026-06173-3 Koushik Guha, Trupti Ranjan Lenka, Susthitha Menon · 2026
Microsystem technologies briefs: edge intelligence and local self-management
DOI 10.1007/s00542-026-06167-1 Jacopo Iannacci · 2026
ANFIS-NSGA-II computational surrogate modeling and optimization of DEP-based microfluidic cancer cell sorter device for healthcare applications
DOI 10.1007/s00542-026-06178-y Mahesh Kumar, Ankur Saxena, Nitesh K. Chourasia, Ashish Kumar, Kulwant Singh · 2026
An elliptic curve cryptography-driven self-certified authentication and key agreement protocol for smart grid
DOI 10.1007/s00542-026-06168-0 Suhadrita Roy, Suyel Namasudra, Priyanath Das · 2026
Front evolution and localized redistribution during confined polymer micro-embossing under different nominal capillary-number conditions
DOI 10.1007/s00542-026-06175-1 Wei-Shen Kuo, Shi-Chang Tseng, Meng-Hsun Tsai · 2026
Numerical spectral analysis of a compact rectangular plasmonic sensor for dual-refractive-index discrimination
DOI 10.1007/s00542-026-06177-z Amrita Veeravalli, Renisa Gracelin, Prakash Poornachari, Kasthuri Palanichamy · 2026
First-principles investigation of transition metal (Au, Ag, Pt, Pb, and Hg) functionalized silicene nanoribbons for interconnect applications
DOI 10.1007/s00542-026-06176-0 Bhupendra Jothe, Sonal Agrawal, Harsh Goud, Sushmita Dandeliya · 2026
Machine learning-assisted optimization of a WS₂–graphene hybrid terahertz metasurface for glucose detection
DOI 10.1007/s00542-026-06156-4 Queen Pahe Mrima, Sarah Namwatikho, Jacob Wekalao · 2026
Area-optimized crossover-free n-bit coplanar ripple carry adder in quantum-dot cellular automata
DOI 10.1007/s00542-026-06170-6 Mohammad Abdullah-Al-Shafi · 2026
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